Characterization of a Monolithically Integrated MEMS X-ray Source

These data contain measurements and characterization results from the development of a monolithically integrated MEMS X-ray source combining a field emission cathode, electron-optical column, transmission X-ray target, and an integrated ion-sorption pump within a single self-contained vacuum microsystem. The dataset includes emission current and stability data, vacuum condition measurements, X-ray spectral data, and operational parameters gathered during device evaluation. These measurements document the performance and stability of the MEMS X-ray source under various electrical conditions, including how emission and vacuum levels influence key properties of generated X-rays such as intensity and spectral energy distribution.