Fundamentals of cathodoluminescence in a STEM: The impact of sample geometry and electron beam energy on light emission of semiconductors_experimental dataset

This dataset contains the raw underlying data for the paper "Fundamentals of cathodoluminescence in a STEM: The impact of sample geometry and electron beam energy on light emission of semiconductors" available in open acess under DOI 10.5281/zenodo.2668222. The archive contains experimental files titled with references to the figures as they appear in the paper.