A design method of microlens arrays for decoherence in lithography illumination systems
收藏DataCite Commons2025-04-27 更新2025-04-16 收录
下载链接：
https://www.scidb.cn/detail?dataSetId=6cccf9b14c9a4283a8c47be907c65a46
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资源简介：
This dataset shows the light field distribution of the designed final decoherent microlens array at the back focal plane of the condenser.
提供机构：
Science Data Bank
创建时间：
2024-12-25
