Dataset for "Strain-driven dewetting and interdiffusion in SiGe thin films on SOI for CMOS-compatible nanostructures"
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资源简介：
The dataset comprises a symmetrical geometry ω-2θ scan performed in triple-crystal mode aligned with the (004) peaks of the SiGe layer and Si device, and reciprocal space maps around the (004) and (224) peaks. AFM and SEM images are also included.
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Zenodo创建时间：
2025-06-21
