Statistic_quasiswing.txt
收藏DataCite Commons2022-05-31 更新2024-07-28 收录
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https://opticapublishing.figshare.com/articles/dataset/Statistic_quasiswing_txt/17090972/1
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资源简介：
The file consists of 10000 lines, each containing 36 layer thickness errors (in nm) obtained in coating simulation using quasi-swing monitoring algorithm
提供机构：
Optica Publishing Group
创建时间：
2021-12-17
