Amplitude ratio data of hexagonal structures prepared by Chemical Vapor Deposition on copper foil substrates

Ellipsometric parameters data use potential is assessment of graphene layer thickness on different surfaces. Data shows dependence of the amplitude ratio on the surface roughness of copper foil, gas concentrations and reaction zone conditions. Multiple amplitude ratio data files were collected from V-VASE Ellipsometer for various hexagonal structures on bare and treated copper foil substrates. Kaleidagraph 4.0 software was used to generate Fig. 1 a-d based on foil thickness and gas flow. Fig. 1 shows the amplitude ratio of materials within the graphite box (blue) and outside (green) on acetic-acid, treated copper foil thickness of (a) and (b) 25 µm, (c) and (d) 75 µm, and methane flow rate of (a), (c) 0.3 sccm and (b), (d) 0.2 sccm as well as control samples (yellow). Matched amplitude ratio was obtained only for 75 µm thick acetic acid treated copper foil at a low methane flow rate of 0.2 sccm. Moreover, Fig. 2 a,b show that the amplitude ratio of 75 µm bare copper foil and 75 µm electro-polished copper foil substrates at methane flow rates of 0.3 sccm were unmatched. This data is useful because it enables a non-destructive analysis of materials to probe materials class and uniformity.