Dataset for "Influence of MOVPE environment on the selective area thermal etching of GaN nanohole arrays"
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资源简介：
This dataset contains scanning electron microscopy (SEM) images of various selective area thermal etching (SATE) experiments. SiN circular nano-opening are created via Displacement Talbot Lithography and Inductively coupled plasma dry etching. Then thermal etching is performed for various conditions within a metal organic vapour phase epitaxy growth reactor to create highly organized GaN nanoholes.
提供机构：
University of Bath创建时间：
2020-03-16
