A MEMS MICROVALVE FOR THE SPACECRAFT ATMOSPHERE MONITOR (SAM) INSTRUMENT
收藏DataCite Commons2023-06-02 更新2025-04-16 收录
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https://dataverse.jpl.nasa.gov/citation?persistentId=doi:10.48577/jpl.FWMUCY
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资源简介：
This paper reports on the design, simulation, and characterization of a MEMS gas microvalve (MV) intended to be used as part of the Spacecraft Atmosphere Monitor (SAM) instrument, a highly miniaturized gas chromatograph mass spectrometer (GC-MS) for the International Space Station (ISS). All performance requirements at the system level were considered for flow and pull-in voltage simulations, and multiple tradeoffs were considered to ensure successful operation of SAM. Results of a selection of three MV generations are presented and discussed, including our latest generation, Rev ψ, that meets all the key performance requirements with significant margin with a measured sampling flow above 0.34 sccm and pull-in voltage below 255 V for a current lower than 1 μA.
提供机构：
Root
创建时间：
2023-05-30
