Raw Data for Control of Ferroelectricity in Solution-Processed Hafnia Films through Annealing Atmosphere

The following raw data are the basis of the paper "Control of Ferroelectricity in Solution-Processed Hafnia Films through Annealing Atmosphere" published in Advanced Electronic Materials in 2024 (DOI 10.1002/aelm.202300893). BM and SG acknowledge Luxembourg National Research Fund (FNR) for supporting this work through the project TRICOLOR (INTER/NWO/20/15079143/TRICOLOR). We would like to thank Prof. Beatriz Noheda, Prof. Monica Acuautla, and Dr. Miguel Badillo for their inputs on the growth process used in this work and electrical characterization of the thin films.