Composition and electrical resistance results of a Ir-Pd-Pt-Rh-Ru composition spread thin film materials library

The dataset contains the results of electrical resistance measurement and composition analysis of a thin film composition spread materials library. 342 measurement areas were evaluated for chemical composition using energy dispersive X-ray spectroscopy and electrical resistance using a 4-point probe. CSV columns: x: x-coordinate of materials library in µm y: y-coordinate of materials library in µm Ir: relative chemical composition in at.% Pd: relative chemical composition in at.% Pt: relative chemical composition in at.% Rh: relative chemical composition in at.% Ru: relative chemical composition in at.% Resistance: electrical resistance in Ohm This dataset is supplementary information for an associated publication. A link to the publication will be provided after publishing.