Deep Learning-Driven Modeling of Oxygen Redistribution and Thermal Transport in Silicon-on-Insulator and Buried-Oxide Layers for SIMOX processDeep Learning-Driven Modeling of Oxygen Redistribution and Thermal Transport in Silicon-on-Insulator and Buried-Oxide Layers for SIMOX process
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Data and code supporting the key findings of “Deep Learning-Driven Modeling of Oxygen Redistribution and Thermal Transport in Silicon-on-Insulator and Buried-Oxide Layers for SIMOX process”.
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figshare创建时间：
2025-06-27
