Raw and analysed data for contribution paper "Low temperature plasma deoxidation of copper surfaces"

Abstract: In this study, the application of a DBD plasma for metal deoxidation was shown on differently oxidized copper surfaces in an Ar/H2 atmosphere at 100 hPa and room temperature. Plasma treatments with a discharge voltage of 11 kV and a frequency of 8.8 kHz yielded an almost complete deoxidation of samples with native Cu2O layers and samples with pre-oxidized CuO layers, both within minutes of the Ar/H2 plasma treatment. The chemical state of the samples was characterized via X-ray photoelectron spectroscopy (XPS). The plasma was analysed by optical emission spectroscopy (OES). Additionally, confocal laser scanning microscopy (CLSM) images show that the employed deoxidation method did not change the morphology of the copper surfaces.