Dataset supporting the publication: 'Development of systematic fitting model for nonlinear nanoelectromechanical resonance analysis'

This dataset supports 'Development of systematic fitting model for nonlinear nanoelectromechanical resonance analysis' paper in IEEE MEMS 2021 conference. This dataset contains: All figures that appear in the publication in the folder “Figures”. Raw data for measurement and simulation for each figure in the folder “Raw_data”. Information about geographic location of data collection: Experiment data was collected in Cryogenic Prober Station in Room 2022 Building 53, University of Southampton. UK, SO17 1BJ