Science Impacts of the SPHEREx All-Sky Optical to Near-Infrared Spectral Survey: Report of a Community Workshop Examining Extragalactic, Galactic, Stellar and Planetary Science
We report on the development of an atomic layer deposition (ALD) process for calcium fluoride thin films using bis(N,N-di-i-propylformamidinato)calcium(II) and anhydrous HF as reactants. Deposition ra