Data underlying the publication: Engineering of Hexagonal Microtextures on Glass

Textured glass is used in a wide range of applications to improve optoelectrical performances, such as photovoltaics, biosensing, microfluidics, and photonics. Honeycomb textures have demonstrated an excellent performance in optical devices using crystalline silicon wafers as opaque substrates. As a pathway to translate these advantages to configurations implementing glass, hexagonal-shaped microsized craters (honeycombs) are made on glass in this study. We use photolithography combined with wet etching for this process. The relationship between photoresist mask design, glass–photoresist adhesion, wet-etching steps, and the mechanism of honeycomb formation is studied.

织构玻璃（Textured glass）被广泛应用于各类场景以提升光电性能，例如光伏（photovoltaics）、生物传感（biosensing）、微流控（microfluidics）以及光子学（photonics）领域。蜂巢织构（Honeycomb textures）在以晶体硅晶圆（crystalline silicon wafers）为不透明衬底（opaque substrates）的光学器件中已展现出优异性能。为将此类优势迁移至采用玻璃作为基底的器件构型中，本研究在玻璃表面制备了六边形微尺寸凹坑（即蜂巢结构）。本研究采用光刻（photolithography）结合湿法刻蚀（wet etching）的工艺完成该制备流程，并对光刻胶掩模（photoresist mask）设计、玻璃-光刻胶附着力（glass–photoresist adhesion）、湿法刻蚀工艺步骤以及蜂巢结构的形成机制之间的关联展开了系统探究。