Data for Metasurface-Stabilized Optical Microcavities

<strong>Data for Metasurface-Stabilized Optical Microcavities</strong><br> M. Ossiander ^{1, *}, M. L. Meretska¹, S. Rourke^1,2, C. M. Spaegele¹, X. Yin¹, I. C. Benea-Chelmus^1,3, F. Capasso^{1, *<br>}<br> 1 John A. Paulson School of Engineering and Applied Sciences, Harvard University, 29 Oxford St, Cambridge, MA 02138, USA<br> 2 University of Waterloo, Waterloo, ON N2L 3G1, Canada<br> 3 Hybrid Photonics Laboratory, École Polytechnique Fédérale de Lausanne, Lausanne, CH-1015, Switzerland<br> * Corresponding Authors: [e-mail], [e-mail]<br> Manuscript published as Nature Communications 14, 1114 (2023) https://doi.org/10.1038/s41467-023-36873-7. <br> <strong>Contents:</strong><br> A table of contents is given below, please see the individual readme files in the respective folders for a description of the included variables. ./design: design files presented in the manuscript<br> * libs: contains the metaatom libraries<br> * design_c450_h600_g4790_dbrn7_q8_ROC20.0: contains the metasurface design files for the 20 um ROC cavity<br> * design_c450_h600_g4596_dbrn7_q8_ROC20.0_phase_shifted: contains the metasurface design files for the phase shifted 20 um ROC cavity<br> * design_c4.5e-07_h600_dbrn5_mirror_dist10900hologram: contains the metasurface design files for the h-shape cavity<br> * design_c4.5e-07_h600_dbrn5_mirror_dist11050hologram_checkers: contains the metasurface design files for the asymmetric dot pattern cavity ./experimental_data: experimental measurements presented in the manuscript<br> * fabry_perot: contains transmission data for the Fabry-Perot cavity<br> * fundamental_mode_excited: contains transmission data for the cavity containing the 20 um ROC metasurface aligned for maximal fundamental mode excitation<br> * higher_mode_excited: contains transmission data for the cavity containing the 20 um ROC metasurface aligned so also higher transverse modes are excited ./simulation_data: FDTD simulations of metasurface microcavities<br> * fabry_perot_distance: contains simulation data for a Fabry-Perot cavity<br> * reflection_phase: contains simulation data to calculate the frequency penetration depth<br> * roc20um: contains simulation data for the 20 um ROC metasurface cavity, including fabrication tolerance, surface_roughness, and mode_volume data<br> * roc_20um_phase_shifted_distance: contains simulation data for the phase shifted 20 um ROC metasurface cavity<br> * h: contains simulation data for the cavity enhancing the H-shaped mode<br> * asymmetric_dot: contains simulation data for the cavity enhancing the asymmetric dot pattern mode ./SEM: SEM picture of a finalized sample<br> <br>