Q-optimised nanoelectromechanical diamond resonators

<br>These files form the data collected upon characterisation of doubly clamped beams and free-free resonator geometries fabricated from rough and polished nanocrystalline diamond films. The data is organised by device number and characterisation technique, with the spreadsheet entitled “Samples” detailing the designs of each device. The .txt files of the S21 transmission measurements are tab limited, with headers detailing the contents of each column. Full details of the work can be found in the published paper.<br>Data includes:<br>- Raw atomic force microscope micrographs of the films prior to fabrication.<br>- Raw atomic force microscope micrographs of the etched devices prior to device release.<br>- SEM micrographs of the fabricated devices.<br>- Raw S21 transmission coefficient measurements.