Dataset of manuscript

Based on the same micro-hot plate structure of metal oxide-catalytic combustion gas sensing, a micro gas sensor is designed and fabricated by MEMS technology. The resistance signal and the heat signal in the same gas-sensitive reaction process are obtained successfully. Target gases in four typical application scenarios are selected to test the sensor, and the gas identification method is established by superimposing resistance signals and thermal signals. Based on this method, the type and concentration of gas can be determined by a single sensing unit, and the function of detecting multiple gases can be realized. The selectivity of the gas sensor are improved. This method is simple and low cost, which can be used as an idea to solve the poor selectivity of semiconductor and catalytic combustion gas sensors, and has reference significance and application value.