Complex Refractive Index of Hafnium Zirconium Oxide (Hf1-xZrxO2, 0≤x≤1)

This dataset contains the complex refractive index calculated from spectroscopic ellipsometry data collected on 20 nm thick hafnium zirconium oxide films subjected to a 600 degree Celsius rapid thermal anneal that are reported in "Compositional dependence of linear and nonlinear optical response in crystalline hafnium zirconium oxide thin films," Journal of Applied Physics, (2020) https://doi.org/10.1063/5.0012175.

本数据集包含从对厚度为20纳米的铪锆氧化物薄膜进行光谱椭偏仪测量的复折射率计算所得数据。该薄膜经600摄氏度快速热退火处理，相关研究成果发表在《应用物理杂志》2020年发表的《晶态铪锆氧化物薄膜的线性和非线性光学响应的组成依赖性》一文中，具体引用信息为：https://doi.org/10.1063/5.0012175。