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Nanoscale elastic-plastic deformation and mechanical properties of 3C-SiC thin film using nanoindentation

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Digital Science - Figshare2026-03-27 更新2026-03-28 收录
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https://curate.curtin.edu.au/articles/journal_contribution/Nanoscale_elastic-plastic_deformation_and_mechanical_properties_of_3C-SiC_thin_film_using_nanoindentation/31693732
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Nanoscale elastic-plastic deformation and mechanical properties of 3C-SiC thin film using nanoindentation
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2026-03-27
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