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High temperature reflectivity of SiC//SiC bonding interface

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DataCite Commons2022-12-07 更新2025-04-15 收录
下载链接:
https://doi.esrf.fr/10.15151/ESRF-ES-970099044
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资源简介:
We plan to study the high temperature evolution of a direct bonding interface between Silicon Carbide materials. The bonding is performed using thin silicon layer deposits on the surfaces of SiC. Due to annealing up to temperatures close to or above the silicon melting temperature, we expect a series of transitions to occur, including melting and dewetting of the confined silicon film.The evolution will be studied using interface reflectivity at medium/high x-ray energy (30keV) and interface scattering. We shall measure the sealing of the gap and the broadening of the interfaces. Crystal scattering will be also followzed to monitor the strain in the layers close to the interface.
提供机构:
European Synchrotron Radiation Facility
创建时间:
2022-12-07
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