measurements

Name: measurements
Creator: CNRS - Institut Neel, SERAS, 25 rue des Martyrs, Bp 166, 38042 Grenoble Cedex 9, France; CNRS - Institut Neel, Nano Laboratoire, 25 avenue des Martyrs, 38042 Grenoble, France; CNRS , Laboratoire Louis Neel, 25 rue des Martyrs, Bp 166x, 38042 Grenoble Cedex 09, France; Institut Neel, Departement QUEST, 25, rue des martyrs, 38042 Grenoble 9, France; Institut Neel, Micro & Nanomagnetism/Nano Department, 25 rue des martyres, BP 166, 38042 Grenoble, France
Published: 2027-01-01T00:00:00+08:00

ESRF Portal2027-01-01 更新2026-04-23 收录

半导体工艺测量

薄膜表征

数据链接：

https://doi.esrf.fr/10.15151/ESRF-ES-1960111965 数据链接链接失效反馈

官方服务：

资源简介：

in the framework of the MIAM project we will test some automatic mesh measurements to fix the setup and the time scale for such experiments. Sample are Si 4 inches wafers with sputtered layer on top. The deposit of the layer had been done at the N'eel institute.

提供机构：

CNRS - Institut Neel, SERAS, 25 rue des Martyrs, Bp 166, 38042 Grenoble Cedex 9, France; CNRS - Institut Neel, Nano Laboratoire, 25 avenue des Martyrs, 38042 Grenoble, France; CNRS , Laboratoire Louis Neel, 25 rue des Martyrs, Bp 166x, 38042 Grenoble Cedex 09, France; Institut Neel, Departement QUEST, 25, rue des martyrs, 38042 Grenoble 9, France; Institut Neel, Micro & Nanomagnetism/Nano Department, 25 rue des martyres, BP 166, 38042 Grenoble, France

创建时间：

2027-01-01