Replication data for : Metasurface supporting quasi-BIC for optical trapping and Raman-spectroscopy of biological nanoparticles

Optical trapping combined with Raman spectroscopy have opened new possibilities for analyzing biological nanoparticles. Conventional optical tweezers have proven successful for trapping of a single or a few particles. However, the method is slow and cannot be used for the smallest particles. Thus, it is not adapted to analyze a large number of nanoparticles, which is necessary to get statistically valid data. Here, we propose quasi-bound states in the continuum (quasi-BICs) in a silicon nitride (Si3N4) metasurface to trap smaller particles and many simultaneously. We use COMSOL Multiphysics version 6.0 for modelling and optimization of the proposed metasurface. The quasi-BIC metasurface contains multiple zones with high field-enhancement (‘hotspots’) at a wavelength of 785 nm, where a single nanoparticle can be trapped at each hotspot. We numerically investigate the optical trapping of a type of biological nanoparticles, namely extracellular vesicles (EVs), and study how their presence influences the resonance behavior of the quasi-BIC. It is found that perturbation theory and a semi-analytical expression gives good estimates for the resonance wavelength and minimum of the potential well, as function of the particle radius. This wavelength is slightly shifted relative to the resonance of the metasurface without trapped particles. The simulations show that the Q-factor can be increased by using a thin metasurface. The thickness of the layer and the asymmetry of the unit cell can thus be used to get a high Q-factor. Our findings show the tight fabrication tolerances necessary to make the metasurface. If these can be overcome, the proposed metasurface can be used for a lab-on-a-chip for mass-analysis of biological nanoparticles.