Optical measuring transducer SiN_300x750 and 300x1000.xlsx
收藏DataCite Commons2023-03-27 更新2024-08-18 收录
下载链接：
https://figshare.com/articles/dataset/Optical_measuring_transducer_SiN_300x750_and_300x1000_xlsx/22340416
下载链接
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资源简介：
Functional schemes dataset for article "An Optical Measuring Transducer for a Microoptoelectromechanical Micro–g Accelerometer Based on the Optical Tunneling Effect"
提供机构：
figshare
创建时间：
2023-03-27
