Experimental Characterization of a Mode-Localized Acceleration Sensor Integrating Electrostatically Coupled Resonators
收藏aip.figshare.com2024-02-22 更新2025-01-09 收录
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https://aip.figshare.com/articles/dataset/Experimental_Characterization_of_a_Mode-Localized_Acceleration_Sensor_Integrating_Electrostatically_Coupled_Resonators/25097498/1
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资源简介：
The classical electrostatically driven double-ended solidly supported MEMS resonator
经典静电驱动两端固定支撑的微机电系统谐振器
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AIP Publishing
