Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors (Data)
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Origin projects, figures and COMSOL simulation used for the article "Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors", published in <em>Journal of Sensors and Sensor Systems </em>on 14 Jan 2019.
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Zenodo创建时间：
2021-11-23
