2026 Canister paper data for release
收藏DataCite Commons2026-01-08 更新2026-05-07 收录
下载链接：
https://rochester.figshare.com/articles/dataset/2026_Canister_paper_data_for_release/31028575/1
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资源简介：
These are the raw data files for the canister paper that we are planning to submit soon for publication. The data themselves consist of raw AFM, XPS, Ellipsometry data, and log files from the operation of the ALD system.All data are presented as tabular .csv files and can be viewed with any spreadsheet or text editor.
提供机构：
University of Rochester
创建时间：
2026-01-08
