Depth profiling of multilayer films by novel sharp tip diamond muATR sensor

The novel diamond muATR sensor for ATR FT-IR spectral acquisition using infrared microscope with a gem quality faceted diamond as an internal reflection element (IRE) was employed for the depth profiling of multilayered films. This technique does not require additional sample preparation and short analysis time. Due to the inherent hardness and sharp-tip, the diamond IRE can be employed for probing depth dependent properties of solid materials. The depth dependent composition of the multilayered film can be collected by varying the diamond penetration under a constant aperture of infrared microscope or by varying the aperture under a constant diamond penetration. The observed spectra were compared to those obtained via the commercial ATR accessory. The ATR spectra acquired by the commercial ATR accessory show the surface information of multilayered film since the probing depth was limited to few micrometers from the interface. The spectra acquired by the diamond muATR sensor clearly indicate the depth dependent chemical information exhibiting different chemical species of multilayered film.