Study on the Effect of Annealing on Ga₂O₃ Thin Films Deposited on Silicon by RF Sputtering
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This dataset is comprised of atomic force microscopy (AFM), Rutherford backscattering spectrometry (RBS), X-ray diffraction (XRD) and ellipsometry measurements performed on Ga₂O₃ thin films deposited on silicon and annealed at different temperatures.
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Zenodo创建时间：
2026-03-05
