In situ GISAXS study of IZO deposition via magnetron sputtering for optoelectronic devices: film growth and ion bombardment-induced etching dynamics

The dataset could be divided into the raw data (XRR data, SEM data, 2D GISAXS detector data, resistance measurement, absorption spectra measurement, XRD data), analysed data (XRR fitting results, GISAXS modelling results) and final images (sketches and all involved plots).