Data repository for: Soft X-Ray Absorption and Fragmentation of Tin-oxo Cage Photoresists

This dataset contains materials for the publication: Soft X-Ray Absorption and Fragmentation of Tin-oxo Cage Photoresists by Jarich Haitjema, Sonia Castellanos, Olivier Lugier, Ivan Bespalov, Rebecka Lindblad, Martin Timm, Christine Bülow, Vicente Zamudio-Bayer, J. Tobias Lau, Bernd von Issendorff, Ronnie Hoekstra, Katharina Witte, Benjamin Watts, Thomas Schlathölter, Albert M. Brouwer <br> PhysChemChemPhys 2024 doi:10.1039/D3CP05428D <br> The data are organized according to the figures in the main text and in the Supporting Information.