Transmission electron microscopy analysis of atomic layer deposited NbTiN/NbN superconducting thin films
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https://aip.figshare.com/articles/dataset/Transmission_electron_microscopy_analysis_of_atomic_layer_deposited_NbTiN_NbN_superconducting_thin_films/30407848
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See the supplementary material for peak finding and diffraction rings of 4DSTEM datasets, including the quantification of elements. Fig. S6 contains the comparison of Tc values of NbN and NbTiN films for different thickness ranges. File before (Before the reviewer response)
提供机构:
AIP Publishing
创建时间:
2025-10-21



