Micro-scale 2D Thermal Gradiometer

The videos demonstrate 2D thermal gradient mappings based on two pairs of 50 µm x- an y- thin film thermocouple (TFTC) sensors. We investigate thin film thermocouples (TFTC) asthermal gradient sensors at the micro-scale and demonstrate two-dimensional dynamic thermal gradient mapping for features as small as 20 μm. Pairs of x-direction and y-direction thermocouples sense the thermal gradient while another calibrates the Seebeck coefficient as S = 20.33±0.01μV/K. The smallest detectable temperature difference is 10 mK, and the sensitivity is 0.5 mK/μm. The minimal Johnson-noise limited performance for thermocouple devices with typical integrated-circuit dimension is 1.4 nV/√Hz. This device can be applied for embedded thermal management systems that require high resolution and rapidresponse thermal management, such as stacked three-dimensional (3D) integrated circuits.本系列视频展示了基于两对50微米级x、y方向薄膜热电偶（thin film thermocouple, TFTC）传感器构建的二维热梯度映射结果。本研究以微型尺度下的薄膜热电偶（TFTC）作为热梯度传感器，实现了针对最小20微米特征的二维动态热梯度映射。x方向与y方向热电偶成对感知热梯度，另有一组热电偶用于校准塞贝克系数，校准结果为S=20.33±0.01μV/K。该传感器可检测的最小温差为10毫开尔文，灵敏度为0.5毫开尔文/微米。采用典型集成电路尺寸的热电偶器件，其约翰逊噪声限制的最低性能为1.4纳伏/√赫兹。该器件可应用于对高分辨率、快速响应热管理有需求的嵌入式热管理系统，例如堆叠式三维（3D）集成电路。