Science Data for published paper-“Fine Optimization of Aberration Compensation for Stealth Dicing”
收藏科学数据银行2024-01-31 更新2026-04-23 收录
下载链接：
https://www.scidb.cn/detail?dataSetId=fd087d1bec2547ebbbe95625aba248ef
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资源简介：
This dataset is the scientific data involved in the published paper entitled "Fine Optimization of Aberration Compensation for Stealth Dicing." These data includes simulated and experimental images, observation data, etc.
提供机构：
上海光机所
创建时间：
2024-01-29
