Electromechanically tunable frequency-agile metamaterial bandpass filters for terahertz waves

Tunable transmission filters are essential for various key terahertz applications including miniaturized spectrometers, hyperspectral imagers and channel selectors in high-speed wireless communication systems. However, tunable terahertz transmission filters have remained elusive, so far. Here, we report an electromechanically reconfigurable microcantilever integrated complementary metamaterial to function as a frequency-agile bandpass transmission filter at terahertz spectral region. A large tunable range of 70% at central frequency of 0.455 THz is designed and the experimental results show switching of terahertz transmission frequency range of 54% at central frequency of 0.5 THz. The proposed electromechanically reconfigurable metadevice provides large tunable range, uses electrical control, and is fabricated using CMOS compatible materials and process, thus making it highly attractive for the realization of plethora of miniaturized high-performance terahertz components and devices.可调谐传输滤波器（Tunable transmission filters）是各类关键太赫兹（terahertz）应用的核心器件，应用场景涵盖微型光谱仪、高光谱成像仪以及高速无线通信系统中的信道选择器。然而迄今为止，可调谐太赫兹传输滤波器始终难以实现。本文报道一种集成机电可重构微悬臂梁（microcantilever）的互补超材料（complementary metamaterial），可作为太赫兹频段下的频率捷变带通传输滤波器。本文设计实现了中心频率0.455太赫兹下70%的宽调谐范围；实验结果表明，该器件在中心频率0.5太赫兹处可实现54%的太赫兹传输频段切换。本文提出的机电可重构超构器件（metadevice）具备宽调谐范围、采用电控方式，且使用CMOS兼容材料与工艺制备，因此在研制诸多微型化高性能太赫兹组件与器件方面极具应用潜力。

搜集汇总

背景与挑战

背景概述

该数据集介绍了一种用于太赫兹波的电可调谐频率敏捷超材料带通滤波器，基于电可重构微悬臂梁集成互补超材料设计，在太赫兹光谱区域实现频率可调谐功能。实验结果显示，在中心频率0.5 THz处可实现54%的传输频率范围切换，具有大调谐范围和电控制优势，且采用CMOS兼容工艺制造，适用于小型化高性能太赫兹应用。