Enhancement of unsteady frequency responses of electro-thermal resonance MEMS cantilever sensors (Data)
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Origin projects and figures used for the article "Enhancement of unsteady frequency responses of electro-thermal resonance MEMS cantilever sensors", published in the proceedings of the 30th Micromechanics and Microsystems Europe Workshop; 18.08.2019 to 20.08.2019; Wolfson College, Oxford, United Kingdom.
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2021-11-23
