SEM micrographs of morphology evolution of VO2 and V2O3 thin films obtained at 1000°C

The DataSet contains the scanning electron microscopy (SEM) micrographs of VO2 and V2O3 thin films obtained by the sol-gel method. The information about sol synthesis is described in the Journal of Nanomaterials. The thin films were deposited on a silicon and quartz glass substrate and were annealing at 1000°C under an argon atmosphere. The surface morphologies of the samples were studied by an FEI Company Quanta FEG 250 scanning electron microscope (SEM) (Waltham, MA, USA), mounting the analyzed sample on a carbon conductive tape.本数据集包含通过溶胶-凝胶法制备的二氧化钒（VO₂）与三氧化二钒（V₂O₃）薄膜的扫描电子显微镜（SEM）显微图像。溶胶合成的相关细节已在《Journal of Nanomaterials》（纳米材料期刊）中予以阐述。该类薄膜被沉积于硅衬底与石英玻璃衬底之上，并在氩气氛围下以1000℃进行退火处理。采用美国马萨诸塞州沃尔瑟姆市FEI公司Quanta FEG 250型扫描电子显微镜（SEM）对样品的表面形貌进行了表征，测试时将待测样品粘贴于碳导电胶带之上。