ALD/E Neuro-symbolic Query Dataset over ORKG Comparisons
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This repository contains the ALD/E Neuro-symbolic Query Dataset over ORKG Comparisons, a curated collection of 33 SPARQL queries (19 for atomic layer deposition, 14 for atomic layer etching) defined over machine-actionable ORKG comparisons of published review tables. Each query bundle corresponds to a concrete literature table and includes (i) a natural-language question, (ii) the executable SPARQL query, (iii) an example result table (results_example.csv), and (iv) rich metadata (metadata.json) linking to the source paper, DOI, ORKG comparison IDs, and query type (easy/complex, within-table/cross-table). The dataset is designed to support neurosymbolic evaluation scenarios, LLM-based query generation, and reproducible meta-analysis of ALD/E chemistries and processes. It targets both materials scientists interested in FAIR, queryable representations of ALD/E knowledge and AI researchers developing systems that bridge natural-language questions with knowledge-graph reasoning.



