five

Refractive index data for 150 nm Ag measured with ellipsometry

收藏
NIAID Data Ecosystem2026-03-12 收录
下载链接:
https://zenodo.org/record/4552068
下载链接
链接失效反馈
官方服务:
资源简介:
This is the refractive index data for 150 nm Ag thin film measured using the Sopra GES 5E spectroscopic ellipsometer. The data is extracted using the bulk calculation model of the WinEliII  software. The incidence angle was 75 degrees, the analyzer was kept at 45 degrees. The film was deposited using e-beam evaporation technique in Lab 600H. The substrate used was silicon wafer of 525 microns thick. 2 nm of titanium was deposited initially as an adhesion layer and 1 nm of AgOx was deposited as the seed layer. It was followed by deposition of Ag (50 nm each for 3 times). The deposition rate of all the metals was 4 angstorm/sec with a base pressure of 1.5*10^(-6) mbar.
创建时间:
2021-02-20
5,000+
优质数据集
54 个
任务类型
进入经典数据集
二维码
社区交流群

面向社区/商业的数据集话题

二维码
科研交流群

面向高校/科研机构的开源数据集话题

数据驱动未来

携手共赢发展

商业合作