Development of MeV TOF-SIMS capillary microprobe at the Ruđer Bošković Institute in Zagreb

New Time-of-flight Secondary Ion Mass Spectrometry (TOF SIMS) setup using MeV heavy ions for the excitation is developed at the Ruđer Bošković Institute accelerator facility. To focus heavy MeV ions to micron dimensions, conical glass capillary is used instead of quadrupole magnetic lenses. The setup uses a continuous primary beam where START signal for TOF is obtained from the PIN diode placed behind the thin transmission sample. Results showing measured energy spectra for several primary heavy ions are presented and compared with theoretical simulations. . The first mass spectra obtained with the new setup using reflectron-type TOF analyzer are given together with the mass and spatial resolution values of the new setup.