Measured data of article in J. Vac. Sci. Technol. A 39, 052401 (2021); doi: 10.1116/6.0001126
收藏NIAID Data Ecosystem2026-03-13 收录
下载链接：
https://zenodo.org/record/6675356
下载链接
链接失效反馈官方服务：
资源简介：
The folder contains raw and fitted data of the in 2021 published article:
Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices,
Authors: Emanuel Knehr, Mario Ziegler, Sven Linzen, Konstantin Ilin, Patrick Schanz, Jonathan Plentz, Marco Diegel, Heidemarie Schmidt, Evgeni Il’ichev, and Michael Siegel,
Journal: Journal of Vacuum Science & Technology A 39, 052401 (2021); https://doi.org/10.1116/6.0001126
The names of the 13 data files include the corresponding figure numbers of the published article.
创建时间：
2022-06-22
