Higher-Mode Contact Resonance Operation of a High-Aspect- Ratio Piezoresistive Cantilever Microprobe (Data)

Raw data, Ansys Workbench Projects and figures used for the article "Higher-Mode Contact Resonance Operation of a High-Aspect- Ratio Piezoresistive Cantilever Microprobe", published in the proceedings of SMSI 2020, which did not take place because of Covid-19 virus pandemic. The data can be opened by a text editor Ansys projects are compressed using 7-Zip and can be opened by Ansys Workbench.