Dataset for "Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-Ray Transparent Samples"

Dataset associated with the publication "Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-Ray Transparent Samples" by Sina Mayr 1,2,*, Simone Finizio 1, Joakim Reuteler 3, Stefan Stutz 1, Carsten Dubs 4, Markus Weigand 5, Aleš Hrabec 1,2,6, Jörg Raabe 1 and Sebastian Wintz 1,7,*. 1 Paul Scherrer Institut, 5232 Villigen PSI, Switzerland 2 Laboratory for Mesoscopic Systems, Department of Materials, ETH Zurich, 8093 Zurich, Switzerland 3 Scientific Center for Optical and Electron Microscopy, ETH Zurich, 8093 Zurich, Switzerland 4 INNOVENT e.V. Technologieentwicklung Jena, 07745 Jena, Germany 5 Helmholtz-Zentrum Berlin, 14109 Berlin, Germany 6 Laboratory for Magnetism and Interface Physics, Department of Materials, ETH Zurich, 8093 Zurich, Switzerland 7 Max Planck Institute for Intelligent Systems, 70569 Stuttgart, Germany