多台阶超表面加工工艺测试实验数据集

多台阶超表面加工工艺测试实验数据集中主要数据为电子束曝光剂量对应纳米结构尺寸（及其偏移量）的关系；套刻工艺形成的台阶化FP腔高度差；最终整体加工的FP腔叠层超表面结构的成品图和电镜图。来源于电子束曝光机进行电子束曝光剂量扫描，并通过台阶仪测量、记录套刻工艺形成的台阶化FP腔高度差，最后通过超高分辨场发射电镜拍摄FP腔叠层超表面结构的成品图和电镜图。数据量为30.12MB。

This experimental dataset for multi-step metasurface processing technology testing mainly contains three types of core data: the relationship between electron beam exposure dosage and the dimensions (and their offsets) of nanostructures, the height difference of the stepped Fabry-Perot (FP) cavity formed by the overlay lithography process, as well as the finished product images and electron micrographs of the finally fabricated FP cavity stacked metasurface structures. The data is collected via electron beam exposure dosage scanning using an electron beam lithography system, followed by step height measurement and recording of the stepped FP cavity height difference formed by the overlay lithography process with a profilometer, and the final capture of the finished product images and electron micrographs of the FP cavity stacked metasurface structures using an ultra-high resolution field-emission electron microscope. The total size of this dataset is 30.12 MB.

搜集汇总

背景与挑战

背景概述

该数据集聚焦于多台阶超表面加工工艺测试实验，核心内容包含电子束曝光剂量与纳米结构尺寸的对应关系、套刻工艺形成的台阶化FP腔高度差，以及FP腔叠层超表面结构的成品图和电镜图。数据来源于电子束曝光机、台阶仪和超高分辨场发射电镜的实验测量与拍摄，总数据量为30.12MB，文件格式包括csv、png和docx，适用于纳米材料加工工艺研究。