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Optical spectroscopy of single InAs/InP quantum dots - preliminary results for deterministic fabrication of photonc structures on InP/SiO2

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Figshare2026-03-25 更新2026-04-28 收录
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https://figshare.com/articles/dataset/Optical_spectroscopy_of_single_InAs_InP_quantum_dots_-_preliminary_results_for_deterministic_fabrication_of_photonc_structures_on_InP_SiO2/28388327
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We demonstrate datasets for low density InAs/InP quantum dots grown by MOCVD. The sample is processed with e-beam lithography and reactive ion etching after flip-chip bonding to the Si/Al/SiO2 to enhance photon extraction. A single quantum dots are examined with high resolution microphotoluminescence experiment using a fiber coupled SNSPD detection.
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2026-03-25
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