Optical spectroscopy of single InAs/InP quantum dots - preliminary results for deterministic fabrication of photonc structures on InP/SiO2

We demonstrate datasets for low density InAs/InP quantum dots grown by MOCVD. The sample is processed with e-beam lithography and reactive ion etching after flip-chip bonding to the Si/Al/SiO2 to enhance photon extraction. A single quantum dots are examined with high resolution microphotoluminescence experiment using a fiber coupled SNSPD detection.