Low Temperature Deposition of Functional Thin Films on Insulating Substrates Enabled by Selective Ion Acceleration using Synchronized Floating Potential HiPIMS
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https://springernature.figshare.com/articles/dataset/Low_Temperature_Deposition_of_Functional_Thin_Films_on_Insulating_Substrates_Enabled_by_Selective_Ion_Acceleration_using_Synchronized_Floating_Potential_HiPIMS/28062617/1
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资源简介：
Complete dataset used in the manuscript: "Low Temperature Deposition of Functional Thin Films on Insulating Substrates Enabled by Selective Ion Acceleration using Synchronized Floating Potential HiPIMS"
提供机构：
Pshyk, Oleksandr; Sommerhäuser, Lars; Patidar, Jyotish; Thorwarth, Kerstin; Siol, Sebastian
创建时间：
2025-05-22
