EDX Analysis to quantify atoms deposition

The EDX test is important for calculating the elements deposited onto the surface. The results of EDX analysis are taken from different temperature parameters, then they will be compared between the use of low and high temperatures preheating. Also, samples using the preheating will be compared with samples that do not use the preheating. During the EDX measurement, different areas were focused and the corresponding peaks are shown in Figure 9. Figure 9. Energy Dispersive X-ray (EDX) analysis to quantify the deposition of atoms on the surface. (a) Sample S4, (b) Sample S1, (c) Sample S2, (d) Sample S3. (M: martensite, MC: metal carbide).能量色散X射线（Energy Dispersive X-ray, EDX）测试在定量计算沉积于样品表面的元素含量方面具有关键作用。本次EDX分析的测试数据取自不同温度参数工况，后续将对比低温预热与高温预热两种方案的分析结果，同时还将对采用预热工艺的样品与未采用预热工艺的样品进行对比分析。在EDX测试过程中，针对多个不同区域开展聚焦检测，对应的特征峰如图9所示。 图9 用于量化表面原子沉积量的能量色散X射线（EDX）分析结果：(a) 样品S4，(b) 样品S1，(c) 样品S2，(d) 样品S3。（M：马氏体，MC：金属碳化物）