Research data for the manuscript "On the integration of dielectrometry into electrochemical impedance spectroscopy to obtain characteristic properties of a dielectric thin film"

### Supplementary Research Data for the manuscript ### "On the combination of capacitive sensing and electrochemical impedance spectroscopy to obtain characteristic properties of a dielectric thin film" ### by Benedikt Sapotta, Matthias Schwotzer, Christof Wöll and Matthias Franzreb ### Content # 1 Impedance_Raw_Data - calibration data for the IDE geometry, only the frequency range 1-2 MHz was used, as mentioned in the main text - impedance sweeps recorded at the end of linker cycles - impedance sweeps recorded at the end of metal cycles - fit results to the equivalent circuit model - animated bode plot of the growth process # 2 Monte_Carlo_Error_Propagation - script and readily compiled input data for the error propagation in accordance to the data flow chart in Fig S4 the script is based on the python programming language and needs to be saved as a .py file # 3 Micrographs - Micrographs used in the manuscript and supporting information # 4 3D_Print_Files_for_Flow_Cell - .stl files of the individual components. The Pogo-Pins were embedded into the mounting using the same Plasgray polymer resin. - two UNF 1/4" 28G threads were cut into the FlowCell at the designated holes after printing for liquid connection - the individual components were fastend with M3 screws # 5 XRD - XRD data of the uncoated and coated IDE geometry### 论文《电容传感与电化学阻抗谱联用获取介电薄膜特性》的补充研究数据 ### 作者：Benedikt Sapotta、Matthias Schwotzer、Christof Wöll 与 Matthias Franzreb ### 内容 # 1 阻抗原始数据 - 叉指电极（Interdigital Electrode, IDE）结构的校准数据，仅使用正文中提及的1~2 MHz频率范围 - 连接剂修饰循环结束时记录的阻抗扫描曲线 - 金属沉积循环结束时记录的阻抗扫描曲线 - 等效电路模型的拟合结果 - 薄膜生长过程的动态波特图 # 2 蒙特卡洛误差传播 - 适配图S4中数据流图的误差传播脚本与预编译输入数据；本脚本基于Python编程语言编写，需保存为.py格式文件 # 3 显微图像 - 论文及补充材料中使用的显微图像 # 4 流动池3D打印文件 - 各组件的.stl格式文件；采用同一款Plasgray聚合物树脂将Pogo-Pins嵌入安装座中 - 打印完成后，需在流动池指定孔位加工两个UNF 1/4" 28G螺纹，用于液体管路连接 - 各组件通过M3型号螺丝固定 # 5 X射线衍射（X-ray Diffraction, XRD）数据 - 未涂层与已涂层叉指电极的XRD数据