Incorporating 3D-Printed Polymer Scaffolds onto MEMS Resonant Chemical Sensors for Enhanced Performance

For Spray Coated PECH, Gyroid IP-PDMS, and Gyroid PUT, the sensitivity response to various concentrations of ethylbenzene, M-xylene, and toluene was simultaneously recorded. The sensitivity difference between two sensors with different sensing film geometry in the tested concentration range is highlighted by the relative frequency change for a 5-µm height gyroid PUT (Brown) and block PUT (Blue) as a function of the analyte concentration for ethylbenzene, M-xylene, and toluene. relative frequency change as a function of the low analyte concentration for M-xylene and toluene for a 5-µm height gyroid PUT (green) on the topside and gyroid PUT (purple) on both sides. In the tested concentration range, this plot illustrates the sensitivity difference between two sensors with distinct sensing film coating regions.